# NanoSIMS Analysis of BMD in Silicon Wafer

> This white paper from Toray Research Center introduces how NanoSIMS can be used to measure oxygen precipitates in a silicon wafer.

Source: https://covalent.com/resource-library/nanosims-analysis-of-bmd-in-silicon-wafer/
Updated: 2026-01-05T10:13:25+00:00

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# NanoSIMS Analysis of BMD in Silicon Wafer

 [![NanoSIMS Analysis of BMD in Silicon Wafer](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2023/10/NanoSIMS-Analysis-of-BMD-in-Silicon-Wafer.jpg)](https://covalent.com/wp-content/uploads/2025/09/trc-sman-en-202109-dc-05-p02206.pdf)

Dec 22, 2021

The NanoSIMS 50L can provide the highest lateral resolution among secondary ion mass spectrometers and can simultaneously achieve high sensitivity and high mass resolution. Here, we introduce examples of measuring oxygen precipitates in silicon wafer.

[Click here to download the Whitepaper](https://covalent.com/wp-content/uploads/2025/09/trc-sman-en-202109-dc-05-p02206.pdf)

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