# Nanoprobing > Visualize local electric fields at the nanoscale. Source: https://covalent.com/techniques/electron-microscopy/nanoprobing/ Updated: 2026-05-18T23:48:45+00:00 --- ![](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/themes/covalent/assets/images/blog-default-banner.jpg) ![](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/themes/covalent/assets/images/blog-mobile-banner.jpg) [Core Lab](https://covalent.com/covalent-core-lab/) # Nanoprobing From Imaging to Electrical Insight—All in One Workflow Covalent offers in-situ nanoprobing for targeted electrical characterization and failure analysis on nanoscale features inside our JEOL PS500i FIB-SEM. [Add to Quote](#) ## What is Nanoprobing? Nanoprobing is an in-situ technique that uses ultra-fine probe tips to make direct electrical contact with microscopic features inside an electron microscope. By positioning probes onto specific device structures under high magnification, engineers can measure local electrical behavior—such as current–voltage (I–V) response—at the region of interest. Unlike traditional optical probe stations, nanoprobing is performed inside an SEM or dual-beam system, allowing you to see with higher precision where the probes are landing and the landing force. This enables direct correlation between a device’s physical structure and its electrical performance while preserving the features, which is critical for advanced semiconductor failure analysis and device debugging. In practice, nanoprobing turns the microscope from a purely imaging, spectroscopy, and crystal structure tool into a functional test platform—letting you not only find a feature or defect, but also determine how it behaves electrically in real time. **Localized Electrical Behavior** Measure electrical behavior where you see the feature, defect, or structure of interest inside the microscope. **Compatible with SEM and Dual Beam Workflows** Use nanoprobing alongside high-resolution imaging, tilt-based workflows, and site-specific failure analysis methods. **Flexible, Modular Platform** Adapt the system for different samples, chambers, and applications with configurable probe count, accessories, and software-guided workflows. Table of Contents ## Why use Nanoprobing? Nanoprobing adds direct electrical interaction to the same SEM workflow already used for imaging, navigation, and site-specific analysis. Instead of stopping at visual/elemental/crystallographic inspection, you can land probes on structures of interest and measure how a device behaves electrically at the nanoscale. ### See, Contact, Measure Visually navigate to a feature, land probes with precision, and immediately measure electrical response at that location. ### Fast Approach, Precise Landing Move quickly across the sample with coarse positioning, then switch to nanometer-scale control for accurate and repeatable probe contact. ### Stable Measurements Over Time Maintain reliable electrical contact on small structures for extended measurements, even under tilt and high-resolution imaging conditions. ## Covalent offers advanced in-situ nanoprobing for semiconductor failure analysis, electrical characterization, and device debugging. [Get a Quote](https://covalent.com/get-a-quote/) ## Working Principle Nanoprobing operates by bringing ultra-fine conductive probe tips into direct contact with specific features on a sample inside an electron microscope. Using high-resolution SEM or dual-beam imaging for navigation, the user first locates the region of interest—such as a transistor gate, interconnect, or suspected defect site—then positions the probes with nanometer-scale precision using multi-axis manipulators. Coarse motion enables rapid positioning across the sample, while fine motion allows controlled, gentle landing of the probe tips onto targeted structures without damaging them. Once contact is established, electrical measurements such as current–voltage (I–V) response, resistance, or continuity can be performed in situ. Because the process occurs inside the microscope, the probe location is visually confirmed, enabling direct correlation between physical structure and electrical behavior. This integration is what distinguishes nanoprobing from traditional probe stations: instead of testing blindly at predefined pads, users can interrogate specific nanoscale features, defects, or interfaces in real time, and immediately connect what they see to how the device performs ### Equipment used for Nanoprobing: We use the Talos™ F200X G2 TEM with Super-X EDS system for DPC and other Transmission Electron Microscopy needs. Imina NANO **Platform type:** integrated into our [JEOL FIB SEM.](https://covalent.com/techniques/electron-microscopy/focused-ion-beam-scanning-electron-microscopy-fib-sem/) **Core motion concept:** Compact mobile nanoprobers with independent multi-axis control **Degrees of freedom:** 4 degrees of freedom per nanoprober **Probe count:** 4 **Positioning resolution:** Nanometer-scale fine positioning **Coarse motion range:** Up to centimeter-scale travel for rapid approach to the region of interest **Fine motion range:** Up to ~15 µm at the probe tip for precise contact landing **Working conditions:** Compatible with short working distances, low accelerating voltage imaging, and high-resolution magnetic-lens imaging conditions **Tilt compatibility:** Supports tilt-compatible workflows, with stable contact maintained at angles used for FIB operations **Probe tips:** Industry-standard tungsten probe tips, with very fine tip-radius options **Software:** Integrated control software for probe positioning, measurement setup, workflow guidance, data handling, and reporting [Specifications](https://imina.ch/en/products/nano-robotics-solutions-electron-microscopes%20) [Core Lab](https://covalent.com/covalent-core-lab/) ![Imina NANO](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2026/04/nano-picture-feature-flexibility.png) ### Key Differentiators TXRF is a technique distinguished by its exceptional surface sensitivity, ultra-trace detection limits, and non-destructive measurement, but it also has key technical constraints. #### Strengths - Direct electrical testing at the site of interest - Real-time correlation between structure and electrical behavior - Nanometer-scale probe placement for localized measurements - Compatible with SEM and dual-beam workflows - Useful for films, particles, transistors, interconnects, defects, and failure-analysis studies - Stable contact for extended in-situ electrical measurements - Flexible platform for a wide range of microelectronic and research devices #### Limitations - Stable contact can be difficult on very small, oxidized, contaminated, or highly topographic features - Better suited for targeted analysis than high-throughput production testing - Requires exposed or accessible structures for reliable probe landing - Measurement quality depends heavily on sample condition, geometry, and operator setup - Often most effective when combined with correlative imaging or cross-sectioning workflows Two colleagues working together on a laptop, discussing a project in a bright, professional environment. ## Unsure whether nanoprobing is right for you? Nanoprobing enables direct, localized electrical measurements at the site of interest inside the SEM—ideal for failure analysis, device debugging, and nanoscale electrical characterization. [Talk to an Expert](https://covalent.com/contact-us/) ## Sample Information Example Output Sample Requirements [https://covalent.com/wp-content/uploads/2026/04/figure-1-probing-at-exposed-alumina-parts-to-investigate-low-ohmic-via-chains.png](https://covalent.com/wp-content/uploads/2026/04/figure-1-probing-at-exposed-alumina-parts-to-investigate-low-ohmic-via-chains.png) Figure 1 – Probing at exposed alumina parts to investigate low ohmic VIA chains. [https://covalent.com/wp-content/uploads/2026/04/figure-2-resistivity-measurement-of-via-chains.png](https://covalent.com/wp-content/uploads/2026/04/figure-2-resistivity-measurement-of-via-chains.png) Figure 2 – Resistivity measurement of VIA chains. [https://covalent.com/wp-content/uploads/2026/04/figure-3-electrical-probing-of-a-single-pmos-transistor.png](https://covalent.com/wp-content/uploads/2026/04/figure-3-electrical-probing-of-a-single-pmos-transistor.png) Figure 3 – Electrical probing of a single PMOS transistor. [https://covalent.com/wp-content/uploads/2026/04/figure-4-transistor-characteristics-iv-curves-function-of-different-gate-voltage-potentials.png](https://covalent.com/wp-content/uploads/2026/04/figure-4-transistor-characteristics-iv-curves-function-of-different-gate-voltage-potentials.png) Figure 4 – Transistor characteristics: I/V curves function of different gate voltage potentials. Measurement success depends on surface and sample preparation. We can help with sample preparation. ### What we accept: - Solid phase. - Must be vacuum stable. - Maximum Sample Height: 55 mm. - Maximum Sample Weight: 500 g (including sample-holder). - Maximum Lateral Dimension: 150 mm (larger samples enabled with reduced rotation). ## Use Cases - Semiconductor Failure Analysis - Device Characterization and Debug - FIB Delayering to Probe Buried Structures - Research Materials and Micro/Nanodevices - Correlative Probing with FIB or SEM Review - Thin Film 4 Point Probe - ![Semiconductor Equipment](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2025/11/uc-semiconductor-equipment.jpg) ### Semiconductor Failure Analysis Nanoprobing is used to electrically interrogate localized areas of a failing device, helping connect electrical behavior to the physical site under investigation. - ![Semiconductor Manufacturing](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2025/11/uc-semiconductor.jpg) ### Device Characterization and Debug Supports in-situ I–V measurements on microelectronic structures to evaluate local device behavior and compare suspect vs. nominal regions. - ![Consumer Electronics](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2025/11/uc-consumer-electronics.jpg) ### FIB Delayering to Probe Buried Structures Delayer the sample and probe exposed surfaces in one tool. - ![Battery and Energy Storage](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2025/11/uc-energy-storage.jpg) ### Research Materials and Micro/Nanodevices Nanoprobing can also be used for localized testing of MEMS, sensors, nanowires, thin films, nanoparticles, graphene, microLEDs, solar cells, and other research-scale devices where direct electrical access under the microscope is valuable. - ![Aerospace and Defense](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2025/11/uc-aerospace-and-energy.jpg) ### Correlative Probing with FIB or SEM Review Combine imaging, probing, and follow-on analysis such as FIB cross-sectioning for deeper root-cause investigation. - ![Metallurgy](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2025/11/uc-metallurgy-and-alloy-developments.jpg) ### Thin Film 4 Point Probe Investigate sheet resistance in thin films. ## Complementary Techniques - [**FIB-SEM**](https://covalent.com/techniques/electron-microscopy/focused-ion-beam-scanning-electron-microscopy-fib-sem/)**/ Dual Beam:** Site-specific cross-sectioning and structural analysis - [**TEM**](https://covalent.com/techniques/electron-microscopy/transmission-electron-microscopy-tem/)**:** Atomic-scale structural characterization after localization - **EDS**: Elemental analysis at the probed location - **Optical Microscopy**: Initial navigation and overview inspection - [**AFM**](https://covalent.com/techniques/morphology-structural-analysis/atomic-force-microscopy-afm-analysis/)**:** Nanoscale surface and topography analysis - **SIMS or**[**XPS**](https://covalent.com/techniques/chemical-analysis/x-ray-photoelectron-spectroscopy/)**:** Chemical and compositional analysis when needed [Scanning Electron Microscopy (SEM) Analysis](https://covalent.com/techniques/electron-microscopy/scanning-electron-microscopy-sem/) Images surface topography and composition with electrons. [Explore](https://covalent.com/techniques/electron-microscopy/scanning-electron-microscopy-sem/) [Add to Quote](#) [Scanning Transmission Electron Microscopy (STEM)](https://covalent.com/techniques/electron-microscopy/scanning-transmission-electron-microscopy-stem/) Provides atomic-scale imaging and spectroscopic mapping. [Explore](https://covalent.com/techniques/electron-microscopy/scanning-transmission-electron-microscopy-stem/) [Add to Quote](#) [X-ray Diffraction (XRD)](https://covalent.com/techniques/morphology-structural-analysis/x-ray-diffraction-xrd/) Non-destructive analysis of crystal phases, lattice, and strain. [Explore](https://covalent.com/techniques/morphology-structural-analysis/x-ray-diffraction-xrd/) [Add to Quote](#) ## Why Choose Covalent for Nanoprobing? Our clients trust Covalent for microscopy-based workflows that connect physical structure to functional behavior. Nanoprobing allows us to go beyond imaging by directly measuring electrical response at the location of interest—enabling faster root-cause analysis and more confident conclusions. ## Frequently Asked Questions Identifying the right test can be complex, but it doesn’t have to be complicated. Here are some questions we are frequently asked. - ### What is nanoprobing used for? Nanoprobing is used to contact small device features and measure local electrical behavior directly inside a microscope. - ### What makes nanoprobing different from a traditional probe station? Nanoprobing allows you to see and contact features at high magnification inside the SEM or FIB, enabling precise correlation between structure and electrical behavior. - ### Can nanoprobing be used with FIB workflows? Yes. Nanoprobing systems are compatible with tilted geometries used in FIB workflows, enabling correlative analysis and in-situ workflows at the same site of interest. - ### What kinds of samples can be tested? Semiconductor devices, interconnects, MEMS, nanowires, thin films, sensors, optoelectronic devices, and other solid-state structures that can be accessed in the microscope. Resources ![](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/themes/covalent/assets/images/resource-bg-c.svg) Resources ![](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/themes/covalent/assets/images/resource-bg-o.svg) [![Beyond the Surface: Next-Generation Scanning Acoustic Microscopy](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2026/03/next-generation-scanning-acoustic-microscopy-768x430.jpeg) Webinar Beyond the Surface: Next-Generation Scanning Acoustic Microscopy 57 mins Apr 16, 2026](https://covalent.com/webinars/next-generation-sam/) [![PED and DPC](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2026/04/covalent-ped-and-dpc-case-study-768x973.png) Case Study PED and DPC Apr 08, 2026](https://covalent.com/resource-library/ped-and-dpc/) [![Seeing the Unseen: The Power of Electron Microscopy](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2026/02/the-power-of-electron-microscopy.jpg) eBook Seeing the Unseen: The Power of Electron Microscopy Feb 25, 2026](https://covalent.com/resource-library/the-power-of-electron-microscopy/) [![Photoinduced Force Microscopy (PiFM) for Photonics Analysis](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/uploads/2026/01/photoinduced-force-microscopy-pifm-for-photonics-analysis.jpg) Case Study Photoinduced Force Microscopy (PiFM) for Photonics Analysis Jan 19, 2026](https://covalent.com/resource-library/pifm-for-molecular-identification-of-contamination-on-photomasks/) [![Solving Bond Uniformity Challenges with SAM](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/themes/covalent/assets/images/resource-thumbnail.jpg) Video Solving Bond Uniformity Challenges with SAM Dec 30, 2025](https://covalent.com/resource-library/solving-bond-uniformity-challenges-with-sam/) [![Failure Analysis in Action: Fracture Analysis of Biomedical Appliances with Advanced Microscopy](https://spcdn.shortpixel.ai/spio/ret_img,q_cdnize,to_auto,s_webp:avif/covalent.com/wp-content/themes/covalent/assets/images/resource-thumbnail.jpg) Video Failure Analysis in Action: Fracture Analysis of Biomedical Appliances with Advanced Microscopy Dec 17, 2025](https://covalent.com/resource-library/failure-analysis-in-action-fracture-analysis-of-biomedical-appliances-with-advanced-microscopy/) Need Expert Guidance? Our experts can help you determine if this approach is the best fit for your samples and discuss the next steps. [Talk to a Materials Scientist](https://covalent.com/contact-us/)