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What is Atomic Resolution Electron Microscopy (AEM)?

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Atomic-scale imaging

Resolves atoms, defects, and interfaces via aberration-corrected STEM.

Correlated chemistry

Maps elemental composition and bonding states via simultaneous EDX/EELS.

Nano-scale strain mapping

Quantifies local stress/strain and lattice distortions via electron diffraction.

What is Atomic Resolution Electron Microscopy (AEM)?

Atomic-scale imaging

Resolves atoms, defects, and interfaces via aberration-corrected STEM.

Correlated chemistry

Maps elemental composition and bonding states via simultaneous EDX/EELS.

Nano-scale strain mapping

Quantifies local stress/strain and lattice distortions via electron diffraction.

What is Atomic Resolution Electron Microscopy (AEM)?

Atomic Resolution Analytical Electron Microscopy (AEM) is an advanced form of electron microscopy that combines the ability to directly visualize individual atoms within a material with simultaneous analytical capabilities for determining elemental composition and chemical state at the atomic scale.

Close-up of mineral explosion with sharp crystal formations in space.

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nibh taciti est facilisi tortor mi, praesent curabitur duis dis vehicula orci accumsan purus primis.
Lectus pretium nascetur sociis magna facilisi purus ut, vivamus venenatis viverra feugiat mollis tincidunt ad libero, rhoncus
vestibulum potenti molestie massa velit. Nec eu nullam aptent dignissim tempor platea hendrerit, sed id fermentum netus
sollicitudin semper laoreet bibendum, dapibus risus auctor arcu aenean cursus. Fringilla vulputate montes porta malesuada
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Flowchart comparing amorphous, crystalline, and mixed materials.

Equipment for AEM

Connect

CAMECA SX100

Element Range: Boron (B) to Uranium (U).
Energy Range: 3 keV to 30 keV.
Current Range: 1 pA to 1 µA.
Spot-Size: approximately 1 µm to 10 µm.
Detectors: 4x WDS detectors; 1 SDD EDS detector.

Core Lab

Keyence VR Wide-Area 3D Measurement System

One-Shot 3D Measurements: Capture 3D CAD surface data instantly, in a single scan.
Automated Field Stitching: Expands X-Y coverage for larger samples.
Wide Magnification Range: 12x to 160x for varied detail requirements.
High Accuracy: Height ±2.5 µm, width ±2 µm in High-Mag Mode.
Flexible Height Measurement: Up to 10 mm in Wide-Field Mode, 1 mm in High-Mag Mode.
Automated Field Stitching: Expands X-Y coverage for larger samples.

Specifications

Key differentiators

Strengths

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Limitations

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Examples output

Atomic resolution HAADF and Optimized bright field (OBF)-STEM images of electron beam irradiation sensitive materials, which cannot be acquired by conventional STEM.

Atomic resolution EDX mapping at AlAs/AlGaAs interface. Elemental diffusion at hetero interfaces can be evaluated with atomic resolution.

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Samples requirements

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AEM applications by industry

Semiconductor

Metrology with Sub-nm Accuracy

Measurement of channel, electrode length, and oxide thickness, including high-k and metal electrodes in FinFET or other latest logic devices.

Material science

Atomic Arrangement Observation

Crystal structure analysis for materials such as zeolite, LiLaZrO, and LiCoO₂, including atomic coordinate identification of oxygen atoms in a local area.

Complementary techniques

2D X-Ray Inspection

2D X-ray inspection delivers clear internal views of complex electronics, supporting faster decisions in production and failure analysis.

Delivers clear internal views of complex electronics.

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4-Point Probe (4PP) Measurement

Four‑point probe measures sheet resistance and resistivity by separating current and voltage paths for accuracy.

Measures sheet resistance and resistivity accurately.

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Atomic Absorption Spectroscopy (AAS)

Atomic Absorption Spectroscopy (AAS) measures elemental concentrations by quantifying the absorption of light by free atoms, enabling accurate, quantitative analysis of target elements in solution-based samples.

Quantify trace metals from ppm to ppb with Atomic Absorption Spectroscopy (AAS) testing for liquids and digested solids used in material characterization.

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Atomic Force Microscopy (AFM) Analysis

AFM scans a sharp probe to map nanoscale topography and material properties with sub‑nanometer sensitivity.

Maps nanoscale topography and material properties with a sharp probe.

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Why Choose Covalent for Your AEM Needs?

Covalent offers in-house high-resolution imaging and analysis of advanced materials, coatings, and devices using state-of-the-art electron microscopy, complemented by spectroscopy and diffraction. Our sophisticated STEM instruments feature the latest aberration correctors and high-sensitivity detectors, with optimized experimental conditions including lamella specimen preparation.

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Frequently Asked Questions

Identifying the right test can be complex, but it doesn't have to be complicated.
Here are some questions we are frequently asked

What microscopy techniques are integrated in atomic resolution AEM?

Transmission electron microscopy (TEM), Scanning Transmission Electron Microscopy (STEM), and spectroscopic methods such as energy-dispersive X-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS).

What are typical applications of AEM?

Studying crystal structures, interfaces, defects, nanoparticles, catalysts, and materials for semiconductors, energy storage, and nanotechnology.

How is atomic resolution achieved?

By sample preparation, using aberration-corrected electron optics, high-stability microscopes, and precise alignment of the electron beam and detectors.

What information can be obtained using atomic resolution analytical electron microscopy?

Atomic structure, elemental composition, chemical bonding, electronic states, and stress and defect distributions at the atomic scale.