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Nanoindentation

Nanoindentation—also called nano-indent, instrumented indentation testing (IIT), or micro-indentation—is a nanomechanical technique used to determine properties such as hardness and elastic modulus.

What Is a Nanoindentation Test?

Nanoindentation characterizes the hardness and elastic modulus of thin films or coatings. It can measure mechanical properties with micron spatial resolution, which is useful for site-specific locations on a device.

It achieves this by measuring a small force (1 µN to 100 mN) and displacement (1 nm to 10 µm) between the indenter tip and the sample surface and then calculating the mechanical properties. By analyzing the load-displacement curve, nanoindentation reveals how materials deform under stress, helping engineers and researchers optimize coatings, films, and device surfaces.

High-Resolution Mechanical Testing

Measures hardness and modulus of thin coatings.

Dynamic Analysis Capability

Uses dynamic mechanical analysis (DMA) or SINUS mode with Covalent's instruments.

Temperature-Dependent Profiling

Evaluates mechanical properties as a function of temperature.

Why Use Nanoindentation?

Our nanoindentation analysis system provides a comprehensive suite of measurements, with load versus force displacement as the primary output. It includes elastic modulus, hardness, creep, stiffness, yield strength, and storage and loss modulus. It also measures fracture toughness, including SEM images for analysis.

Unlike macroindentation methods such as Vickers or Brinell, nanoindentation probes the mechanical properties without influencing the substrate.

Material Compatibility

Our nano scratch testing is compatible with a variety of solid materials, ranging from plastics, metals, and ceramics, while ultra-soft materials like hydrogels or biopolymers are more challenging.

Depth Resolution: 1nm

Load Resolution: µN . Lateral Resolution: Depends on the indenter’s contact depth during the test. The radius of curvature of the indenter is 100 to 200 nm.

Depth Profiling

Use sinusoidal mode or progressive multicycles to probe mechanical properties vs. depth.

How Nanoindentation Works

SINUS mode is an advanced dynamic testing method that applies a sinusoidal oscillation to measure a material’s mechanical properties with high precision. The SINUS mode can convert data into stress-strain curves to identify the yield point. Covalent’s instrument features a reference indenter system for detecting surface contact, which is ideal for soft materials, and a heating stage that allows measurements from RT to 200 °C, analyzing mechanical properties at varying temperatures. During unloading, the slope of the load-displacement determines the elastic modulus, while hardness is derived from the indenter’s contact area.

Equipment Used for Nanoindentation

Anton Paar STeP (Standard Testing Platform) 600
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Anton Paar STeP (Standard Testing Platform) 600

The Anton Paar STeP (Standard Testing Platform) 600 has three testing heads.

    • UNHT3 (Ultra Nanoindentation Tester).
      • Can apply a sinusoidal load profile for dynamic mechanical testing.
      • Consists of a temperature control sample stage (RT-200C) for measuring hardness, modulus, and viscoelastic properties as a function of temperature.
    • MCT3 (Micro-combi Tester, used for micro-indentation and micro-scratch).
    • NST3 (nano-scratch tester).

Key Differentiators

Specific benefits of Covalent’s system include SINUS mode for dynamic mechanical testing and a reference indenter that maintains surface contact for precise, long-duration, or soft-material measurements.

Strengths

  • Small force and displacement resolution required to measure hardness and modulus of thin coatings.
  • RT–200 °C temperature profiling.
  • Dynamic mechanical testing for viscoelastic materials.

Limitations

  • Not suited for concave sample surfaces.
  • The accuracy of ≤5 microns is challenging.
  • Not suited for soft materials, but accessible through our partner lab network.
  • High surface roughness can induce variation.

Example Outputs

An AFM image of an indent on fused quartz was taken, which is a standard reference for tip area calibration. In this case, we took an AFM image to measure the contact depth of the indenter under a specific load.
An AFM image of an indent on fused quartz was taken, which is a standard reference for tip area calibration. In this case, we took an AFM image to measure the contact depth of the indenter under a specific load.
Indentation and progressive load scratch comparison of two hard coat films. Layer 1 shows a higher hardness than Layer 2, indicating that a higher load was required to displace the tip in Layer 1 the same distance as Layer 2.
Indentation and progressive load scratch comparison of two hard coat films. Layer 1 shows a higher hardness than Layer 2, indicating that a higher load was required to displace the tip in Layer 1 the same distance as Layer 2.

Sample Requirements

Samples must be solid materials and ideally flat. If they are not, some mechanical preparation may be required for more reliable testing. Surface roughness may need to be analyzed to determine the correct load and contact depth. As a general rule of thumb, the contact depth.

Nanoindentation Applications by Industry

Semiconductor

Mechanical properties of low k dielectric films.

Battery

Hardness of isolated graphite particles.

Consumer Electronics

Measurement of channel, electrode length, and oxide thickness, including high-k and metal electrodes in FinFET or other latest logic devices.

Medical

Loss modulus vs temperature of pressure-sensitive adhesives used in medical sensors.

Techniques That Complement Nanoindentation

Indentation

Complementary to chemical analysis techniques such as ICP-OES, SEM-EDS, or GD-OES. It correlates the chemical composition of the film with the mechanical properties.

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Scratch Testing
Characterizes how thin films shear or delaminate under progressive load. This is typically correlated with film hardness.
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Optical Microscopy or SEM
These techniques are used to image the indent. If a customer is interested in fracture toughness, we can measure the crack length propagating from the indent edge.
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Why Choose Covalent for Your Nanoindent Needs?

Covalent offers nanoindentation testing on the Anton Paar STeP 600 platform, featuring UNHT3 dynamic mechanical testing with SINUS mode and a temperature-controlled stage (RT–200 °C). Our reference indenter system ensures stable surface contact-ideal for soft or time-dependent materials. Clients can collaborate live with our experts during setup to ensure the right parameters and data outputs for their application.

Frequently Asked Questions

What properties can Nanoindent measure?

Nano-indent is suited to measuring various aspects of a given sample, including hardness, elastic modulus, creep, stiffness, yield strength, fracture toughness, storage, and loss modulus.

What types of materials can be tested?

Nano-indent is compatible with metals, ceramics, plastics, coatings, and thin films.

What is the spatial and depth resolution on Nanoindent?

Our nano-indent has a depth resolution of 1 nm, a load resolution of 1 µN, while the lateral resolution depends on the indenter’s contact depth.

What complementary techniques are useful to use alongside the nano indenter?

We suggest using optical or SEM imaging to visualize indents and cracks, as well as scratch testing to measure adhesion, shear, or delamination behavior of coatings.

Can you test mechanical properties at elevated temperatures?

Yes. Our UNHT3 system includes a heating stage for testing from room temperature up to 200°C.