What Is a Glow Discharge Optical Emission Spectroscopy (GDOES)
GDOES is a technique for elemental compositional analysis and depth profiling of solids. It is particularly well suited for analysis on thin‑ and thick‑film samples, or for depth‑profiling of multilayer film stacks.
The advantages of GDOES are short analysis times with minimal sample prep, the ability to measure a wide range of elements simultaneously (including C/H/N/O), fast depth profiling, and the ability to analyze surface and bulk composition in a single measurement.
High Depth Resolution
Wide Element Range
Fast Multi-Element Profiling
Why Use GDOES?
Glow Discharge Optical Emission Spectroscopy (GDOES) is a fast, quantitative technique for elemental composition and depth profiling of solid materials. It enables simultaneous detection of all elements, including light ones like H, C, N, O, and Li—with minimal sample preparation.
GD-OES is ideal for studying thin films, multilayers, and coatings across metals, semiconductors, and ceramics, providing rapid, high-resolution insights that support R&D, quality control, and failure analysis.
Rapid Layer Insight
Minimal Sample Prep
Broad Material Compatibility
How GDOES Works
In a GDOES measurement, a low‑pressure glow‑discharge (GD) plasma (typically Argon) is used to sputter away the surface of the sample being measured. As material is sputtered from the surface, the high‑energy plasma induces subsequent fluorescence events characteristic of the elements in the plasma. These photons are detected by an optical emission spectrometer (OES).
The intensity (for a given emission line) is proportional to element concentration in the ionizing plasma. Time can be correlated to depth from a sample’s surface, enabling depth profiling and quantitative compositional analysis.
Equipment Used for GDOES
Covalent’s GDOES capability is powered by the GD-Profiler 2 pulsed RF Glow Discharge Optical Emission Spectrometer, enhanced with Differential Interferometry Profiling (DiP). This system delivers ultra-fast, high-resolution depth profiling across thin and thick coatings, with nanometer-scale precision in erosion depth measurement. It supports all elements from trace to bulk, handles both conducting and insulating materials, and includes advanced optical detection for high dynamic range and simultaneous multi-element analysis, which is ideal for multilayers, interfaces, and bulk composition studies.
Horiba Profiler 2 Pulsed-RF Glow Discharge Optical Emission Spectrometer
- Spectral Range: 120 nm to 800 nm.
- Simultaneous measurement: Of all elements, including light elements H, C, N, O, F, L.
- Spot Size: 2 to 8 mm.
- Depth resolution: As low as ~1 nm.
- High Dynamic Detector with industry-leading integration times and linear dynamic acquisition range (5 x 109).
- Plasma Sputtering Ion Energy: 50eV.
- Pulsed Plasma Gas Ion Frequency: 13.56 MHz RF.
- Anode Tube Diameter: 4mm.
Key Differentiators
| Property | GDOES |
|---|---|
| Spectral Range | 120 to 800 nm |
| Elements Measured | Full periodic table including light elements H, C, N, O, F, Li |
| Spot Size | 2 to 8 mm |
| Depth Resolution | ~1 nm |
| Plasma Sputtering Ion Energy | 50 eV |
| Pulsed Plasma Gas Frequency | 13.56 MHz RF |
| Anode Tube Diameter | 4 mm |
| Measurement Capability | Surface and bulk composition, multilayer depth profiling |
| Strengths | Fast profiling, minimal sample prep, nm-scale depth resolution, wide dynamic range |
| Limitations | Less sensitive than GD-MS, external calibration is needed, and high-energy sputtering may cause light element diffusion |
| Sample Requirements | Solid, flat, smooth, or rigid materials; conductive preferred; insulating possible with care |
Strengths
- Wide dynamic range (ppm to wt%).
- Full periodic table.
- Excellent depth resolution (nm-scale).
- Fast depth profiling.
- Minimal sample prep.
- Great for quickly profiling complex layered materials.
Limitations
- Less sensitive than GD-MS.
- Elemental concentration and depth scales both need external calibration.
- High-energy sputtering may cause diffusion of light elements, limiting accuracy.
Example Outputs
Sample Requirements
- Solid, flat, smooth, or rigid materials.
- Conductive materials are preferred for optimal performance.
- Insulating materials can be analyzed, but may pose additional challenges.
GDOES Applications by Industry
Metallurgy
Verify the composition of alloys and measure the thickness of oxides or coatings, supporting routine quality control operations.
Photovoltaics
Determine the thickness and chemical composition of multilayered materials and assess interface quality and interdiffusion.
Energy & Battery Manufacturing
Use depth profiling of electrodes to assess the depth of lithiation.
Consumer Electronics
Identify and quantify impurities in specific regions or layers of printed circuit boards (PCBs).
Aerospace & Composites
Determine the thickness and chemical composition of coatings.
Techniques That Complement GDOES
Quantifies multiple elements at very low concentrations.
Why Choose Covalent for Your Glow Discharge Optical Emission Spectroscopy Needs?
Our expert team at Covalent has extensive experience with the Glow Discharge Optical Emission Spectroscopy technique. We also offer complementary metrology techniques in-house and an air-free transfer module for our clients.