Covalent

Time of Flight Secondary Ion Mass Spectroscopy (ToF-SIMS)

Ultra-sensitive surface analysis for organics and inorganics. ToF-SIMS delivers chemical imaging, depth profiling, and 3D reconstruction with nanometer precision.

What Is Time Of Flight Secondary Ion Mass Spectroscopy?

Time-of-flight Secondary Ion Mass Spectroscopy (ToF-SIMS), also known as ToF-SIMS or Time-of-Flight SIMS, is a highly sensitive surface analysis technique that provides detailed elemental and molecular information from a sample’s outermost layers. ToF-SIMS combines traditional Secondary Ion Mass Spectroscopy (SIMS) with a time-of-flight (ToF) mass analyzer to create exceptional sensitivity, high mass resolution, and comprehensive chemical mapping capabilities.

High-Resolution Chemical Imaging

Generates chemical maps and 3D depth profiles to visualize spatial distributions with submicron resolution.

Ultra-Sensitive Surface Analysis

Captures surface chemistry from the top 1-2 nanometers with exceptional detection limits and precision.

Molecular and Isotopic Detection

Provides detailed identification of elements, molecules, and isotopes with unparalleled mass resolution and sensitivity.

The ToF-SIMS working principle diagram shows a primary ion beam hitting a sample surface and ejecting secondary ions, which are then separated by mass inside the time-of-flight analyzer.

Why Use ToF-SIMS?

ToF-SIMS delivers powerful insights into contamination, thin films, and surface chemistry with unmatched sensitivity.

Advantages of ToF-SIMS:

  • Extreme Surface Sensitivity: Analyzes only the top 1–2 nm of the surface.
  • Exceptional Detection Limits: Detects species down to parts-per-billion levels.
  • Wide Mass Range: Identifies all elements (H–U), isotopes, and molecular fragments up to 10,000 amu.
  • High Spatial Resolution: Produces chemical maps with submicron lateral resolution (as fine as ~50 nm in some modes).

Trace Contamination Detection

Identifies contaminants and impurities at ultra-low concentrations that other surface methods miss.

Nanometer-Scale Depth Profiling

Resolves compositional changes in thin films and multilayers with ~1 nm precision.

3D Chemical Visualization

Combines imaging and depth analysis to reconstruct full three-dimensional chemical maps.

How ToF-SIMS Works

ToF-SIMS works by bombarding a sample surface with primary ions (typically Bi), causing the ejection of secondary ions from the surface's top 1-2 nanometers. These secondary ions are then accelerated in an electric field and travel through a flight tube, with lighter ions reaching the detector before heavier ones. By precisely measuring these flight times, the technique identifies elements and molecules present on the surface with extraordinary sensitivity.

Equipment Used for ToF-SIMS

IONTOF M6 System

  • Primary Beam: 30 keV BiGa cluster Nanoprobe 50.
  • Secondary beam:
    • Thermal Ionization Cesium Source.
    • Oxygen Electron Impact Gas Ion Source.
    • Fully Integrated Ar Gas Cluster Ion Source.
  • Analyzed Depth: 2nm.
  • Mass Resolution: > 30,000.
  • Analytical Sensitivity: Down to high ppb.
  • Spatial Resolution: ~50nm.
  • Sputter Depth: 2-3 mic.
Specifications

Key Differentiators

The key benefits of ToF-SIMS include its ability to detect all elements (including isotopes), its extremely high sensitivity (parts per billion range), excellent surface specificity, and the capacity to generate high-resolution 2D chemical maps and 3D chemical reconstructions. These capabilities make ToF-SIMS testing an invaluable tool for investigating surface chemistry, contamination, layer structures, and interfaces across various materials and industries.

Strengths

  • Extreme surface sensitivity (top 1–2 nm).
  • Very high mass resolution and ppb detection limits.
  • Detects all elements, isotopes, and many molecules.
  • Enables high-resolution chemical imaging and mapping.
  • Supports depth profiling and 3D chemical reconstruction.

Limitations

  • Destructive when performing depth profiling.
  • Limited quantification without proper standards.
  • Requires vacuum-stable, solid samples.
  • Sensitive to surface roughness and topography.
  • Provides limited chemical-state information.

Example Outputs

High-resolution ToF-SIMS maps reveal lithium enrichment at the surfaces of NMC particles relative to the Ni+Co+Mn matrix.
Multicolor elemental mapping highlights the spatial distribution of Al, Li, and binder.
This case study highlights the capabilities of ToF-SIMS for contamination analysis using a multilayer In/Ga/Al sample containing sodium. By combining depth profiling with chemical mapping, the origin of the contamination was identified. The results indicate that sodium is a surface contaminant, most likely from a fingerprint, rather than gallium contamination, which would have appeared uniformly across all upper-layer materials.

Sample Requirements

  • Solid phase.
  • Stable under ultra-high vacuum conditions.
  • Max dimensions: 60 mm (L) x 60 mm (W) x 20 mm (H).
  • Flatter topographies improve signal detection.
  • For powder samples, 5-10 mg is sufficient.
  • Handle samples with gloves.
  • Pack in a glass, hard plastic box, or aluminum foil.

Nanoindentation Applications by Industry

Semiconductor

ToF-SIMS is crucial for quality control, process optimization, and device reliability in the industry.

Energy Storage

ToF-SIMS is instrumental in analyzing and delivering insights crucial for developing high-performance, long-lasting energy storage solutions.

Medical Device

ToF-SIMS helps assess the longevity of medical implants and devices, which in turn improves material selection and surface modification.

Pharmaceutical

ToF-SIMS analyzes essential information for developing effective drug delivery systems and ensuring the safety and performance of biomedical products.

Environmental & Geological Sciences

ToF-SIMS analyzes various materials to help understand pollutant dispersion, assess soil contamination, and characterize mineral surfaces for research and industrial purposes.

Techniques That Complement ToF-SIMS

Combines well with ToF-SIMS to correlate surface topography with chemical information.
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Like ToF-SIMS, AES is surface-sensitive but offers faster quantification and better spatial resolution for specific elements.
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SEM-EDS provides high spatial resolution morphological information alongside bulk elemental analysis, complementing the surface-specific chemistry from ToF-SIMS.
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XPS provides quantitative elemental composition and chemical state information.
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Why Choose Covalent for Your ToF-SIMS Needs?

Covalent combines deep surface analysis expertise with the advanced capabilities of the IONTOF M6 to deliver detailed insights into surface chemistry, composition, and chemical bonding. Our experts provide complementary material characterization options, thorough documentation, and actionable interpretation, supported by a powerful data platform for organizing and analyzing results. Every project receives personalized support and strict protection of confidential and proprietary information.

Frequently Asked Questions

What sample types are suitable for ToF-SIMS analysis?

ToF-SIMS can analyze most solid materials that are vacuum compatible, including metals, semiconductors, polymers, ceramics, glass, paper, and biological samples. Samples should ideally be flat and stable under ion bombardment.

Is ToF-SIMS destructive?

ToF-SIMS can be operated in both static (minimally destructive) and dynamic (destructive) modes. Static SIMS analyzes only the outermost surface with minimal damage, while dynamic SIMS intentionally removes material for depth profiling. We can advise on the best approach for your specific needs.

How deep can ToF-SIMS analyze into the sample?

In static mode, ToF-SIMS is sensitive to the top 1-2 nm of the surface. In dynamic depth profiling mode, it can analyze up to several micrometers, depending on the material and sputtering conditions.

Can ToF-SIMS provide quantitative results?

ToF-SIMS is primarily qualitative or semi-quantitative. Quantification requires appropriate standards with known concentrations of the elements of interest in a matrix similar to your sample. We can discuss quantification options based on your specific analytical needs.