Toray Research Center possesses the world's first introduced high-spatial-resolution RBS system. Accurate composition and density evaluation of a small area can be realized by using a high-energy micro-ion-beam. The composition and density analysis of the IGZO layer in the flexible OLED device and Ir quantification in the emission layer are shown in this white paper.
Composition and Density Analysis in OLED Devices Using Micro-RBS
This white paper summarizes how Rutherford Backscattering Spectroscopy (RBS) is used to analyze the composition and density of OLED devices.