Covalent

April 30 2020, 11:00 am PT

SEM/FIB DualBeam Microscopy: A Powerful Combination

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About this webinar

Scanning electron microscopy is one of the fastest growing analytical techniques on the market. It allows analysts to investigate both surface and subsurface morphological features on a sub-micron scale, and is fundamental to the development and optimization of modern semiconductors, devices, thin films, and more.

In this overview video, Covalent's Director of Scanning Electron Microscopy, Dr. Dave Soltz, lends his expertise to guide you on a journey into the nano- and micro-scale world of electron imaging. He'll summarize the kinds of signal particles today's SEM tools can detect, and will discuss how they actually generate images (called "micrographs") and capture chemical information from the sample. Beyond these basics, Dr. Soltz will introduce the Focused Ion Beam (FIB) module, and show you how it has been used to drive advanced analytical applications in materials science and microelectronics.

This Webinar Will Answer:

  1. How does an SEM capture images with electrons? Why is this advantageous?
  2. What kinds of signals can SEM be used to detect? What information can these signals provide about a sample?
  3. How does a focused-ion-beam incorporate in a DualBeam FIB-SEM tool? Why is this useful?
  4. What kinds of applications and metrology problems are SEM / FIB well suited to solve?
  5. How can SEM be paired with energy dispersive spectroscopy (EDS) to probe chemical composition information from a sample?